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ME0102JY (for Migration Test)




 

Specifications
Wafer Size 12 inch
Chip Size 20mm×25mm
Chip Name Chip_10_15 Chip_20_25 Chip_30_35
Metal Height 5.5μm
Facing Length 3mm
Line/Space 15μm/10μm 15μm/15μm 15μm/20μm 15μm/25μm 15μm/30μm 15μm/35μm
Pitch 25μm 30μm 35μm 40μm 45μm 50μm
Number of Chip 34 chips/wafer   40 chips/wafer   34 chips/wafer  





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